History of Science and Engineering Annotation << Back LABORATORY OF MICROSTRUCTURING AND SUBMICRON DEVICES: 30 YEARS FROM MICROTO NANOPRIBOR K.V. Rudenko, V.V. Vyurkov The essay describes the history of the formation and development of the Laboratory of Microstructuring and Submicron Devices in the Institute of Physics & Technology of Russian Academy of Sciences which for almost 30 years was led by Academician of RAS А.А. Orlikovsky. The achievements of the Laboratory in the area of fundamental investigations for fabrication of micro- and nanostructures of electronics devices are highlighted. Keywords: nanoscale transistor; nanostructures; electron beam lithography; plasma technologies for nanostructuring. DOI: 10.25791/intstg.08.2018.103 Contacts: Е-mail: rudenko@ftian.ru Pp. 23-36.