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History of Science and Engineering

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30th ANNIVERSARY OF THE INSTITUTE OF PHYSICS AND TECHNOLOGY OF RAS
V.F. Lukichev, K.V. Rudenko, V.A. Kalnov

The history of foundation and development of the Institute of Physics and Technology of the Russian Academy of Sciences is presented, and this year it celebrates the 30th anniversary. Scientifi c sub-divisions of IPT RAS, the directions of research and scientific-organizational activity are described.
Keywords: Integrated circuit; microelectronics; nanoelectronics; quantum computer; electronic component base; nanotransistor; modeling of microelectronic technologies; lithography; plasma and ion-beam technologies for nanoelectronics; magnetic nanomaterials; MEMS and NEMS.


DOI: 10.25791/intstg.08.2018.101

Contacts: Е-mail: lukichev@ftian.ru

Pp. 03-17.

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