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History of Science and Engineering

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LABORATORY OF SURFACE PHYSICS OF MICROELECTRONIC STRUCTURES: THE DEVELOPMENT OF MODERN METHODS OF MICROAND NANOELECTRONICS MATERIALS DIAGNOSTICS BY METHODS OF X-RAY DIFFRACTOMETRY, GAMMARESONANCE SPECTROSCOPY AND MAGNETOMETRY
M.A. Chuev, A.A. Lomov

The development of the Laboratory of «Surface Physics and Microelectronic Structures» since its Foundation to the present time is shown. The most interesting results are considered.
Keywords: surface physics; gamma-resonance spectroscopy; X-ray diffractometry and magnetometry; studies with subnanometric accuracy.


DOI: 10.25791/intstg.08.2018.105

Contacts: Е-mail: chuev@ftian.ru

Pp. 47-53.

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